The Research of Diamond Coatings Morphology Evolution under the Action of Reactive Ion Etching in Perpendicular Direction

Abstract:

The evolution of the CVD diamond coatings morphology after perpendicular direction reactive ion etching was investigated. During the surface treatment, the average surface roughness was reduced. The efficiency of the etching decreases with the increasing of the processing time, until the surface roughness has been reduced by 30±5%. The height points spread over the surface were measured. The quality of the obtained films was investigated using the Raman spectroscopy.

• Periodical: Key Engineering Materials (Volume 712)
• Pages: 87-92
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.712.87
• Online since: September 2016
• Authors: Vitaly V. Okhotnikov*, Stepan A. Linnik, Aleksandr V. Gaydaychuk
• Keywords: Coatings, Diamond Coating, Diamond Film, Glow Discharge Plasma, Hydrogen Plasma, Ion Beam Etching, Ion Etching, Reactive Ion Etching, Roughness, Surface Morphology

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