Influence of Micro End Mill Tool Run-Out on Machining Accuracy

Abstract:

Micro-channel chips used in micro total analysis systems have been attracting attention in the medical field. Photolithography, which is a technology used in semiconductor manufacturing, is used to manufacture micro-channel chip dies. This technology requires many processes, such as making photomasks, applying photoresist to a substrate, and the availability of expensive clean-room facilities. Micro-channel chips have ‘micro-channels,’ which are micro-grooves having a width of 30–100 μm. These fine grooves require high accuracy in manufacture; for example, the surface roughness on the bottom face is 1.0 μmRz. A previous study showed how tool run-out on the order of several μm incurred during micro-groove milling, reduced machining accuracy, and tool life. To bridge that gap, this study investigated how to form a fine groove by using micro endmilling. Specifically, a method was experimentally examined for reducing the influence of tool run-out on machining accuracy by using two types of endmill—two-tooth square and ball—by modifying the tool setting angle. Modifying the tool setting angle improved the surface roughness of one side of the groove, and reduced change of cutting force in two-tooth square-endmilling. In addition, it was able to reduce the influence of groove width on tool run-out by up to 1/10. A modification of tool setting angle in ball endmilling reduced the influence of tool run-out on machining accuracy.

• Periodical: Key Engineering Materials (Volume 749)
• Pages: 21-26
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.749.21
• Online since: August 2017
• Authors: Shin Nakai*, Yukio Maeda, Daisuke Goto, Kazuya Kato, Hideaki Tanaka, Takanori Yazawa, Tatsuki Otsubo
• Keywords: Micro End Mill, Micro-Channel Chip, Micro-Groove, Milling, Tool Run-Out

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