Ultramicrohardness Measurement of Silicon Nitride Films

Abstract:

Article Preview

Info:

Periodical:

Key Engineering Materials (Volumes 89-91)

Main Theme:

Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

547-552

Citation:

X. Cai et al., "Ultramicrohardness Measurement of Silicon Nitride Films", Key Engineering Materials, Vols. 89-91, pp. 547-552, 1994

Online since:

August 1993

Export:

Price:

$38.00