Analysis of Buried Nitride Layers Produced by Ion Implantation

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

749-750

DOI:

10.4028/www.scientific.net/KEM.89-91.749

Citation:

D. Fröse and D. Kollewe, "Analysis of Buried Nitride Layers Produced by Ion Implantation", Key Engineering Materials, Vols. 89-91, pp. 749-750, 1994

Online since:

August 1993

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$35.00

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