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HomeKey Engineering MaterialsKey Engineering Materials Vols. 99-100Detection of Absolute Number Densities of Atomic...

Detection of Absolute Number Densities of Atomic Hydrogen in Diamond-Like Carbon (DLC) Deposition Plasmas

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Advances in Engineering Materials

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Periodical:

Key Engineering Materials (Volumes 99-100)

Pages:

363-370

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.99-100.363

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Online since:

March 1995

Authors:

R.C. Cheshire, V. Kornas, H.F. Döbele, K. Donnelly, Denis P. Dowling, W.G. Graham, T. Morrow, T. O'Brien

Keywords:

Diamond-Like Carbon (DLC), Hydrogen Atoms, Thin Film

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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