The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon

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Edited by:

A. L. Laskar et al.

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109-131

Citation:

R.B. Fair "The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon", Materials Science Forum, Vol. 1, pp. 109-131, 1984

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January 1984

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$38.00

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