The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon

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Edited by:

A. L. Laskar et al.

Pages:

109-131

DOI:

10.4028/www.scientific.net/MSF.1.109

Citation:

R.B. Fair "The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon", Materials Science Forum, Vol. 1, pp. 109-131, 1984

Online since:

January 1984

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$35.00

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