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HomeMaterials Science ForumMaterials Science Forum Vols. 105-110Investigation of Radiation Defects in Proton...

Investigation of Radiation Defects in Proton Irradiated Silicon

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Periodical:

Materials Science Forum (Volumes 105-110)

Pages:

1017-1020

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.105-110.1017

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Online since:

January 1992

Authors:

A.I. Girka, S.V. Merenkov, B.V. Shemaev, A.D. Mokrushin

Keywords:

Annealing, Defect, Silicon, Vacancy

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Сopyright:

© 1992 Trans Tech Publications Ltd. All Rights Reserved

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