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HomeMaterials Science ForumMaterials Science Forum Vols. 119-121Investigation of the Influence of Impurities on...

Investigation of the Influence of Impurities on the Grain Boundary Relaxation in Thin Al-Films on Si-Substrates

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Periodical:

Materials Science Forum (Volumes 119-121)

Pages:

273-278

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.119-121.273

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Online since:

January 1993

Authors:

H.G. Bohn, C.M. Su

Keywords:

Al-Alloy Thin Films, Grain Boundary Relaxation

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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