Paper Titles

Grain Boundary Characteristics in Polysilicon
p.797

Thermodynamic Properties of Nanocrystalline Metals
p.803

Information on Grain Boundary Structure in Nanocrystalline Pd and Cr from Diffraction Studies
p.813

Mechnical Properties of Nanostrucutred Materials and Relation to Microstructure
p.823

Stability of Nanocrystalline Materials
p.824

Modeling of Interfaces of Nanostructured Materials
p.825

Modeling of Si₃N₄ Thin Layers Deposition out of Gaseous Phase
p.829

Transformation Interfaces and Precipitation in Alloy Steels
p.833

IIB92: Concluding Remarks
p.837

HomeMaterials Science ForumMaterials Science Forum Vols. 126-128Modeling of Si3N4 Thin Layers Deposition out of...

Modeling of Si₃N₄ Thin Layers Deposition out of Gaseous Phase

Article Preview

Abstract:

You might also be interested in these eBooks

Intergranular and Interphase Boundaries in Materials

Info:

Periodical:

Materials Science Forum (Volumes 126-128)

Pages:

829-832

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.126-128.829

Citation:

Cite this paper

Online since:

January 1993

Authors:

S.P. Kostenko, Yu A. Potchkin, G.D. Tishchenko

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1993 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation: