Deposition of Nanocrystalline Metal Films by Cluster Beams Produced by a Pulsed Arc Cluster Ion Source

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Periodical:

Materials Science Forum (Volumes 235-238)

Edited by:

Dino Fiorani and Mauro Magini

Pages:

267-272

DOI:

10.4028/www.scientific.net/MSF.235-238.267

Citation:

E. Barborini et al., "Deposition of Nanocrystalline Metal Films by Cluster Beams Produced by a Pulsed Arc Cluster Ion Source", Materials Science Forum, Vols. 235-238, pp. 267-272, 1997

Online since:

October 1996

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$35.00

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