Deposition of Nanocrystalline Metal Films by Cluster Beams Produced by a Pulsed Arc Cluster Ion Source

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 235-238)

Edited by:

Dino Fiorani and Mauro Magini

Pages:

267-272

Citation:

E. Barborini et al., "Deposition of Nanocrystalline Metal Films by Cluster Beams Produced by a Pulsed Arc Cluster Ion Source", Materials Science Forum, Vols. 235-238, pp. 267-272, 1997

Online since:

October 1996

Export:

Price:

$38.00