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HomeMaterials Science ForumMaterials Science Forum Vol. 246Gas Deposition

Gas Deposition

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Surface Coatings for Advanced Materials

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Periodical:

Materials Science Forum (Volume 246)

Pages:

153-180

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.246.153

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Online since:

January 1997

Authors:

C. Hayashi

Keywords:

Aerosol, Deposition, Electronic Components, Nanoparticle

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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