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HomeMaterials Science ForumMaterials Science Forum Vols. 308-311Graded Dielectric Thin Films Prepared by Chemical...

Graded Dielectric Thin Films Prepared by Chemical Solution Deposition

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Functionally Graded Materials

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Periodical:

Materials Science Forum (Volumes 308-311)

Pages:

544-548

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.308-311.544

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Online since:

May 1999

Authors:

S. Hoffmann, R. Liedtke, R. Slowak, U. Hasenkox, Rainer Waser

Keywords:

(Ba,Sr)TiO₃, Graded Thin Film, Integrated Capacitors, Temperature Coefficient

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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