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HomeMaterials Science ForumMaterials Science Forum Vols. 315-317Controlled Growth of Yttrium Oxysulphide Thin...

Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

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Rare Earths '98

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Periodical:

Materials Science Forum (Volumes 315-317)

Pages:

216-221

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.315-317.216

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Online since:

July 1999

Authors:

K. Kukli, M. Peussa, L.-S. Johansson, E. Nykänen, L. Niinistö

Keywords:

Atomic Layer Epitaxy, Thin Film, Yttrium Oxysulfide, β-Diketonate Precursor

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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