Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition

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Periodical:

Materials Science Forum (Volumes 315-317)

Main Theme:

Edited by:

R.C. Woodward

Pages:

216-221

DOI:

10.4028/www.scientific.net/MSF.315-317.216

Citation:

K. Kukli et al., "Controlled Growth of Yttrium Oxysulphide Thin Films by Atomic Layer Deposition", Materials Science Forum, Vols. 315-317, pp. 216-221, 1999

Online since:

July 1999

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$35.00

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