The Interface of Sputter-Deposited TiNi Thin Film on (100) Si Wafer

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Periodical:

Materials Science Forum (Volumes 327-328)

Edited by:

Toshio Saburi

Pages:

127-130

DOI:

10.4028/www.scientific.net/MSF.327-328.127

Citation:

S. K. Wu et al., "The Interface of Sputter-Deposited TiNi Thin Film on (100) Si Wafer", Materials Science Forum, Vols. 327-328, pp. 127-130, 2000

Online since:

January 2000

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