Single Source Precursor-CVD for Nano-Scaled Ceramics and Cermets

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 343-346)

Edited by:

J. Eckert, H. Schlörb and L. Schultz

Pages:

531-538

DOI:

10.4028/www.scientific.net/MSF.343-346.531

Citation:

M. Veith "Single Source Precursor-CVD for Nano-Scaled Ceramics and Cermets", Materials Science Forum, Vols. 343-346, pp. 531-538, 2000

Online since:

May 2000

Authors:

Export:

Price:

$35.00

In order to see related information, you need to Login.