Single Source Precursor-CVD for Nano-Scaled Ceramics and Cermets

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Periodical:

Materials Science Forum (Volumes 343-346)

Edited by:

J. Eckert, H. Schlörb and L. Schultz

Pages:

531-538

Citation:

M. Veith, "Single Source Precursor-CVD for Nano-Scaled Ceramics and Cermets", Materials Science Forum, Vols. 343-346, pp. 531-538, 2000

Online since:

May 2000

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