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HomeMaterials Science ForumMaterials Science Forum Vol. 352Voltage-Current Characteristics of the Unbalanced...

Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films

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Periodical:

Materials Science Forum (Volume 352)

Pages:

29-34

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.352.29

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Online since:

August 2000

Authors:

M. Zlatanović, M. Gajić, U. Kašćak, I. Popović, V. Godjevac

Keywords:

Bias Voltage-Current Characteristics, Magnetron Discharge Voltage-Current Characteristics, Unbalanced Magnetron

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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