Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films

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Edited by:

D.P. Uskokovic, G.A. Battiston, J.M. Nedeljkovic, S.K. Milonjic and D.I. Rakovic

Pages:

29-34

Citation:

M. Zlatanović et al., "Voltage-Current Characteristics of the Unbalanced Magnetron for Reactive Deposition of Thin Films", Materials Science Forum, Vol. 352, pp. 29-34, 2000

Online since:

August 2000

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$38.00

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