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HomeMaterials Science ForumMaterials Science Forum Vols. 386-388Synthesis and Properties of Al-Based Amorphous and...

Synthesis and Properties of Al-Based Amorphous and Nanocrystalline Thin Films

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Metastable, Mechanically Alloyed and Nanocrystalline Materials 2001

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Periodical:

Materials Science Forum (Volumes 386-388)

Pages:

315-322

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.386-388.315

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Online since:

January 2002

Authors:

L. Berger, J.W. Mrosk, Ch. Ettl, Hans Jorg Fecht

Keywords:

Amorphous Metals, Interconnect, MEMS Materials, Metallization

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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