Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films

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Periodical:

Edited by:

Dragan P. Uskokovic, Giovani A. Battiston, Slobodan K. Milonjic, Dejan I. Rakovic

Pages:

159-164

DOI:

10.4028/www.scientific.net/MSF.413.159

Citation:

B. Goncić et al., "Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films", Materials Science Forum, Vol. 413, pp. 159-164, 2003

Online since:

September 2002

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$35.00

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