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HomeMaterials Science ForumMaterials Science Forum Vol. 413Low-Energy Broad-Beam Sputter Deposition of TiNx...

Low-Energy Broad-Beam Sputter Deposition of TiN_x Thin Films

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Contemporary Studies in Advanced Materials and Processes

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Periodical:

Materials Science Forum (Volume 413)

Pages:

159-164

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.413.159

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Online since:

September 2002

Authors:

B. Goncić, N. Popović, Ž. Bogdanov, S. Zec, M. Zlatanović

Keywords:

Ion Beam Reactive Sputtering, Preferred Orientation, Resistivity TiN Thin Films

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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