Qualitative Analysis of Silicon Nitride Synthesized by Ammonolysis of Silicon Tetrachloride

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Periodical:

Materials Science Forum (Volumes 416-418)

Edited by:

Lucio Salgado and Francisco Ambrozio Filho

Pages:

688-692

DOI:

10.4028/www.scientific.net/MSF.416-418.688

Citation:

K. C.S. Richetto et al., "Qualitative Analysis of Silicon Nitride Synthesized by Ammonolysis of Silicon Tetrachloride", Materials Science Forum, Vols. 416-418, pp. 688-692, 2003

Online since:

February 2003

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$35.00

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