Growth of Nanocrystalline Diamond Films on Co-Cemented Tungsten Carbide Substrates by Hot Filament CVD

Fang Hong Sun; Zhi Ming Zhang; H.S. Shen; Ming Chen

doi:10.4028/www.scientific.net/MSF.471-472.52

Paper Titles

Development of a Cutting Database System with Prediction and Analysis Functions
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Research on Multifunctional Micro Machining Equipment
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Investigation on Performance of QT700-2 Material by Laser Peening
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Evaluation and Measurement of Surface/Subsurface Crack Damage of Ground Ceramics
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Growth of Nanocrystalline Diamond Films on Co-Cemented Tungsten Carbide Substrates by Hot Filament CVD
p.52

Ultrasonic Machining Mechanism of Sintered Nd-Fe-B Magnetic Materials
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Research on Ultra-Precision Process of STAVAX ESR
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A Study on the Microstructure of Ti(C,N) Matrix Cermet Tool Material
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Strain Path Analysis of an Axisymmetric Part within Controlled Forming Process
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HomeMaterials Science ForumMaterials Science Forum Vols. 471-472Growth of Nanocrystalline Diamond Films on...

Growth of Nanocrystalline Diamond Films on Co-Cemented Tungsten Carbide Substrates by Hot Filament CVD

Abstract:

Nanocrystalline diamond films were deposited on Co-cemented carbide substrates using CH4/H2/Ar gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The evidence of nanocrystallinity, smoothness and purity was obtained by characterizing the sample with scanning electron microscopy (SEM), X-ray diffraction (XRD), Raman spectroscopy, atomic force microscopy (AFM), high-resolution transmission electron microscopy (HR-TEM) and selected-area electron diffraction (SAED). A new process was used to deposit composite diamond films by a two-step chemical vapor deposition procedure including first the deposition of the rough polycrystalline diamond and then the smooth fine-grained nanocrystalline diamond. The results show that the film consists of nanocrystalline diamond grains with sizes range from 20 to 80 nm. The Raman spectroscopy, XRD pattern, HR-TEM image and SAED pattern of the films indicate the presence of nanocrystalline diamond. Surface roughness is measured as Ra<100nm by AFM. Smooth nanocrystalline diamond layers can be deposited on conventional microcrystalline diamond layers using a two-step chemical vapor deposition by regulating the deposition parameters. These composite diamond films with the multiplayer (nanocrystalline/microcrystalline) structure have low surface roughness and high adhesive strength on WC-Co substrates. The diamond-coated tools and drawing dies with these composite coatings display excellent performances in the practical application.