Micro-Anode Guided Electroplating (MAGE) Control System

Dong Liang Lee; Jui Chang Lin; P.F. Kao; S.B. Jiang

doi:10.4028/www.scientific.net/MSF.505-507.115

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HomeMaterials Science ForumMaterials Science Forum Vols. 505-507Micro-Anode Guided Electroplating (MAGE) Control...

Micro-Anode Guided Electroplating (MAGE) Control System

Abstract:

This article releases the details of the equipment development for the micro-anode guided electroplating MAGE fabrication. The microstepping architecture, electroplating power source, control system architecture, measurement system, man machine interface and the control prodedure will be described. Metallic columns around 100 micrometers in diameter were fabricated up to 2cm long with this equipment to demonstrate its performance. An innovative intermittent MAGE mode is supported by this equipment so that it can produce micro columns of finer surface morphology and better circumferential uniformity than the conventional continuous electroplating.

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Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

115-120

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.115

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Online since:

January 2006

Authors:

Dong Liang Lee, Jui Chang Lin, P.F. Kao, S.B. Jiang

Keywords:

3D Micro-Structure, Localized Electro-Deposition, MAGE, Micro-Anode Guided Electroplating, Micro-Fabrication

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