Contour Controller Design for Two-Dimensional Stage System with Friction

Abstract:

For multiple-axis stages, it is required to operate the axes simultaneously, such that the resulting trajectory of platform follows a given contour. For most stage systems, friction acts as the major disturbance which degrades the precision of system motion and its effect should be compensated. In this paper, contouring control of a two-dimensional stage system subjected to friction is investigated. A systematic contour controller design based on task coordinate frame is proposed and its effectiveness is studied through theoretical analysis and numerical simulations.

• Periodical: Materials Science Forum (Volumes 505-507)
• Pages: 1267-1272
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.505-507.1267
• Online since: January 2006
• Authors: Chen Hsieh, K.C. Lin, Chieh Li Chen
• Keywords: Contouring Control, Friction Compensation, Multivariable System

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DOI: 10.1109/9.376053