Contour Controller Design for Two-Dimensional Stage System with Friction
For multiple-axis stages, it is required to operate the axes simultaneously, such that the resulting trajectory of platform follows a given contour. For most stage systems, friction acts as the major disturbance which degrades the precision of system motion and its effect should be compensated. In this paper, contouring control of a two-dimensional stage system subjected to friction is investigated. A systematic contour controller design based on task coordinate frame is proposed and its effectiveness is studied through theoretical analysis and numerical simulations.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
C. Hsieh et al., "Contour Controller Design for Two-Dimensional Stage System with Friction", Materials Science Forum, Vols. 505-507, pp. 1267-1272, 2006