Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling
The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behavior of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. Identifying its parameters is very important; so the genetic algorithm is studied to find the optimal parameters. To verify the feasibility of the proposed method, it is implemented on the precision positioning task of the piezo-actuated stage in the real-time control architecture.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
C. J. Lin and S. Y. Chen, "Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling", Materials Science Forum, Vols. 505-507, pp. 487-492, 2006