Precision Positioning of Piezo-Actuated Stages Based on Feedback Control with GA Modeling

Abstract:

The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behavior of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. Identifying its parameters is very important; so the genetic algorithm is studied to find the optimal parameters. To verify the feasibility of the proposed method, it is implemented on the precision positioning task of the piezo-actuated stage in the real-time control architecture.

• Periodical: Materials Science Forum (Volumes 505-507)
• Pages: 487-492
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.505-507.487
• Online since: January 2006
• Authors: Chih Jer Lin, Shu Yin Chen
• Keywords: Genetic Algorithm (GA), Hysteresis, Modeling, Observer, Parameter Identification

References

[1] Uchino, K, Piezoelectric Actuator and Ultrasonic Motors, Kluwer Academic Publishers, Norwell MA (1997).

[2] Croft, D., Shedd, G., and Devasia, S., Proc. of Amer. Cont. Conf., 2123 (2000).

[3] Ge, P. and Jouaneh, M., Prec. Engi. 17, 211 (1995).

[4] Stepanenko, Y. and Su, C. Y., Proc. of 37th IEEE Conf. Deci. and Cont., 4234 (1998).

[5] Goldfarb, M. and Celanovic, N., J. Dyna. Syst. Meas. and Cont., Tran. ASME, 119, 478 (1997).

[6] Zhang, X. L. et al., Proc. IEEE Conf. Intel. Proc. Syst., 602 (1997).