193 Excimer Laser Machined Electromagnetic Optical Scanning Mirror for a Laser Projection Display
Electromagnetic optical scanning mirrors for both horizontal and vertical scanning of a Laser Projection Display have been proposed. Electromagnetic actuation is selected because of the millimeter-sized mirror. For low cost reason, the glass and PMMA films are respectively used as the main structure of horizontal and vertical scanning mirrors. A mathematical model considering the operation frequency of the Laser Projection Display has been derived to fast design the geometry of the scanning mirror. In order to machine scanning mirrors with high quality geometry, the 193 nm excimer laser is used as the major machine tool. Different control circuits have been developed to control both horizontal and vertical scanning. The scanning frequencies, 4.15 kHz and 260 Hz respectively for horizontal and vertical scanning mirrors, have been measured by laser Doppler vibrometer. Comparing to other optical scanners, 193 nm excimer laser machined optical scanning mirrors have advantages in low cost and easy to fabricate. In this paper, a Laser Projection Display consisting of the horizontal and vertical scanning mirrors has also been built to show the application potential. A 2-D single color image with resolution of 46 × 32 pixels, 4.15 kHz of horizontal scanning frequency and 60Hz of regulated vertical scanning frequency has been demonstrated.
Wunyuh Jywe, Chieh-Li Chen, Kuang-Chao Fan, R.F. Fung, S.G. Hanson,Wen-Hsiang Hsieh, Chaug-Liang Hsu, You-Min Huang, Yunn-Lin Hwang, Gerd Jäger, Y.R. Jeng, Wenlung Li, Yunn-Shiuan Liao, Chien-Chang Lin, Zong-Ching Lin, Cheng-Kuo Sung and Ching-Huan Tzeng
C. H. Lin et al., "193 Excimer Laser Machined Electromagnetic Optical Scanning Mirror for a Laser Projection Display", Materials Science Forum, Vols. 505-507, pp. 601-606, 2006