Thin film photocatalysts of TiO2 coated on the glass were prepared to self-clean and eliminate air pollutants by spin coating process with Ti(OC3H7 i)4, including PEG. The surface structure of TiO2 films changed according to the molecular size of PEG. It was found that NOx was efficiently eliminated by the TiO2 film photocatalyst. The contact angle of water drop on the TiO2 films decreased to less than 10°. It revealed the hydrophilic property of TiO2 films. The morphology and the crystal structure of TiO2 films were affected most.