The Influence of Acoustic Cavitation to Microscopic Material Removal in Polishing Process Based on Vibration of Liquid: A Numerical Study

Abstract:

In Polishing Process based on Vibration of Liquid (PVL), abrasive particles driven by polishing liquid will brush and etch workpiece to achieve material removal. Because the liquid is vibrated in ultrasonic frequency, polishing process will be greatly affected by cavitation phenomenon. The critical thermal conditions and high-speed liquid jet produced by bubble dynamics may damage workpiece. A refined Dissipative Particle Dynamics method is applied to study the effect of acoustic cavitation on PVL. Validity of the numerical simulation is tested according to experimental results.

• Periodical: Materials Science Forum (Volumes 532-533)
• Pages: 301-304
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.532-533.301
• Online since: December 2006
• Authors: Zhong Ning Guo, Zhi Gang Huang, Xin Chen
• Keywords: Acoustic Cavitation, Dissipative Particle Dynamics, Micro Jet, Polishing

References

[1] P.J. Hoogerbrugge and J.M.V.A. Koelman: Europhys. Lett., Vol. 19 (1992), p.155.

[2] P. Espanol and P.B. Warren: Europhys. Lett., Vol. 30 (1995), p.191.

[3] R.D. Groot and P.B. Warren: J. Chem. Phys., Vol. 107 (1997), p.4423.

[4] C. Marsh: Theoretical aspects of Dissipative Particle Dynamics (Oxford Press, British 1998).

[5] D.C. Rapaport: The Art of Molecular Dynamics Simulation, 2nd Edition (Cambridge University Press, Cambridge, British 2004).