Deposition of High-Tc Superconducting Thin Films by Reactive Magnetron Sputtering of Alloy Targets

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Periodical:

Materials Science Forum (Volumes 62-64)

Edited by:

J. Barthel et al.

Pages:

221-222

DOI:

10.4028/www.scientific.net/MSF.62-64.221

Citation:

L. Illgen et al., "Deposition of High-Tc Superconducting Thin Films by Reactive Magnetron Sputtering of Alloy Targets", Materials Science Forum, Vols. 62-64, pp. 221-222, 1991

Online since:

January 1991

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$35.00

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