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HomeMaterials Science ForumMaterials Science Forum Vols. 62-64Simulation of Growth Structure of PVD Thin Films

Simulation of Growth Structure of PVD Thin Films

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Materials Science for High Technologies

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Periodical:

Materials Science Forum (Volumes 62-64)

Pages:

741-742

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.62-64.741

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Online since:

January 1991

Authors:

J. Musil, J. Prchal

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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