With reference to the principle that the strong detonation wave generates the transient dynamic high pressure, the small power pulse power supply and the electrode micro-detonation wave generator are developed. The engineering ceramic material machining with low cost is realized successfully with the devices. It is shown from the study results that there is a degenerative layer about 0.25~0.45mm thick, which is composed of amorphous phases and crystalloid Si and can be machined and removed with the ceramic tool after micro-detonation machining. There are obvious transverse cracks near the interface of the degenerative layer and the matrix, but the cracks along the depth direction are not found. The performance of the degenerative layer is roundly analyzed and its removing mechanism is primitively discussed.