Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery

Arunav S. Banerjee; Richard Blaikie; Wen Hui Wang

doi:10.4028/www.scientific.net/MSF.700.195

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Trapping Single Cells: Comparison between Sandwiched Insulation with Back Contact (SIBC) and Planar Biochip
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Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery
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SEM Characterisation of the Cellulose Material Treated with Polycarboxylic Acid and Zeolite Nanoparticles
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HomeMaterials Science ForumMaterials Science Forum Vol. 700Microfabrication Process for XYZ Stage-Needle...

Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery

Abstract:

In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.

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Periodical:

Materials Science Forum (Volume 700)

Pages:

195-198

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.700.195

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Online since:

September 2011

Authors:

Arunav S. Banerjee, Richard Blaikie, Wen Hui Wang

Keywords:

Array, Cell, Electrostatic Actuation, Micro-Electromechanical System (MEMS), Microneedle, Oxidation, RIE, Wet Etching

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