Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery
In this paper, we present our ongoing work on developing a microfabricated XYZ stage-needle arrayed single crystal silicon (SCS) structure for cellular delivery and surgery. We discuss the device design and working principle based on electrostatic actuation. We also briefly discuss our microfabrication process flow and show some preliminary results of fabricating arrays of microneedles that are 250 µm long and 5 µm at the tip diameter.
B. J. Ruck and T. Kemmitt
A. S. Banerjee et al., "Microfabrication Process for XYZ Stage-Needle Assembly for Cellular Delivery and Surgery", Materials Science Forum, Vol. 700, pp. 195-198, 2012