Simulation of the Young’s Modulus Anisotropy in CVD Diamond Film

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Abstract:

The relationship between textures and Young’s modulus in CVD diamond films was simulated based on the phenomenological theory, which indicates the textures induce the Young’s modulus anisotropy. The increase of methane concentration changes the density of different fiber textures in diamond films, which induces the increase of Young’s modulus in the directions that parallel to the film surface. Among the textures, {111} texture is of no influence whereas {011} texture has the maximum influence on the Young’s modulus anisotropy of diamond film.

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Materials Science Forum (Volumes 704-705)

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1117-1122

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December 2011

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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