Eigenvalue Analysis of Roots Type Vacuum Pump Using FE-Method

Jeong Hoon Lee; Jong Myeong Lee; Jeong Min Ha; Dong Sik Gu; Byeong Keun Choi

doi:10.4028/www.scientific.net/MSF.762.668

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Eigenvalue Analysis of Roots Type Vacuum Pump Using FE-Method
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HomeMaterials Science ForumMaterials Science Forum Vol. 762Eigenvalue Analysis of Roots Type Vacuum Pump...

Eigenvalue Analysis of Roots Type Vacuum Pump Using FE-Method

Abstract:

The demand and importance of vacuum pumps are increasing, because the necessity of dry vacuum pump is proven in semiconductor industry. Various types of vacuum pumps have been developed, and in this research a roots type vacuum pump has been analyzed with a variety of mathematical analysis. Analysis of eigenvalue by FEM analysis and Modal Test were performed through the Roots type vacuum pump and using the results of irregular vibration and instability an assessment has been performed.