Research on the Floating Motion Platform for Detecting Surface Defects in KDP Crystal

Ming Jun Chen; Wen Ming Zhang; Ran Liao; Yong Xiao

doi:10.4028/www.scientific.net/MSF.800-801.537

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HomeMaterials Science ForumMaterials Science Forum Vols. 800-801Research on the Floating Motion Platform for...

Research on the Floating Motion Platform for Detecting Surface Defects in KDP Crystal

Abstract:

The ultra-precision floating motion platform is the key device for equipment detectingand processing optical elements, and this paper mainly studies the floating motion platform used fordetecting the surface detects in KDP crystal. The load capacity of air cushion supporting the floatingmotion platform is studied theoretically and experimentally, and finally the supply pressure of thefour air cushions were optimized under the guidance of its load characteristic curve. The structureparameter of plane flexure hinge, a key part of floating motion platform, is optimized and thesimulation results show that the optimized plane flexure hinge can eliminate the disturbance inZ-direction obviously, which is produced by the two motors. Finally the support position of crystalholder is optimized by means of static and modal analysis; and the set of optimized support way canmake the maximum deformation of the platform reducing by 2μm and make the 1st order naturalfrequency increase from 49.078Hz to 51.787Hz.

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Periodical:

Materials Science Forum (Volumes 800-801)

Pages:

537-542

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.800-801.537

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Online since:

July 2014

Authors:

Ming Jun Chen*, Wen Ming Zhang, Ran Liao, Yong Xiao

Keywords:

Floating Motion Platform, Flotation Parameters Setting, KDP Crystal, Structure Optimization

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* - Corresponding Author

References

[1] Hwang J, Park C H, Lee C H, et al. Estimation and correction method for the two-dimensional position errors of a planar XY stage based on motion error measurements [J]. International Journal of Machine Tools and Manufacture, 2006, 46(7): 801-810.

DOI: 10.1016/j.ijmachtools.2005.07.021

Google Scholar

[2] Lee S Q, Gweon D G. A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings [J]. Precision Engineering, 2000, 24(1): 24-31.

DOI: 10.1016/s0141-6359(99)00022-7

Google Scholar

[3] Xuedong C, Xianzhong Y, Xueming H, et al. DYNAMIC CHARACTERISTIC ANALY-SIS OF PRECISE LONG STROKE LINEAR MOTOR WITH AIR-BEARING IN OPTICAL LITHOGRAPHY[J]. Chinese Journal of Mechanical Engineering, 2008, 21(2).

DOI: 10.3901/cjme.2008.02.017

Google Scholar

[4] Belforte G, Colombo F, Raparelli T, et al. Comparison between grooved and plane aerostatic thrust bearings: static performance[J]. Meccanica, 2011, 46(3): 547-555.

DOI: 10.1007/s11012-010-9307-y

Google Scholar

[5] Wang Hongxi, Wang Yanbo, Bai Zhaohui. Analyzing and Testing of the Rigidity of Guiding Mechanism Incorporating the Plane Flexure Hinges [J]. Journal of Xi'an Institute of Technology, 2012, 32(8): 631-634.

Google Scholar