Sputtering of Aluminium Alloys by Bombardment with 0.5 keV Neon Ions

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Periodical:

Materials Science Forum (Volumes 97-99)

Edited by:

G. Szenes

Pages:

719-724

Citation:

A.P. Korgiaviy et al., "Sputtering of Aluminium Alloys by Bombardment with 0.5 keV Neon Ions ", Materials Science Forum, Vols. 97-99, pp. 719-724, 1992

Online since:

January 1992

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