New Approach for Fabricating of Deep Submicron Free-Standing Polyimide Thin Film

Abstract:

A new approach for manufacturing ultrathin free-standing polyimide film was proposed. This approach involves casting polyamic acid solution to a Al-doped zinc oxide film coated substrate sputtered at room temperature and to form polyamic acid film. The polyamic acid film was released from substrate in 0.5% diluted hydrochloric acid. Then polyamic acid was reattached to glass substrate and was transformed into polyimide film by thermal imidization with gradient heat treatment process. After that, thickness of the1000 nm polyimide film was reduced by KrF excimer laser ablation with 100 pulses at 45 mJ/cm² and 30 pulses at 75 mJ/cm², and 200 nm free-standing polyimide film was obtained. By this method, free-standing polyimide films of 1000 nm and 200 nm thickness were fabricated without and with excimer laser ablation reduction, respectively.

• Periodical: Materials Science Forum (Volume 984)
• Pages: 137-143
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.984.137
• Online since: April 2020
• Authors: Ren Chen Liu*, Jing Lu
• Keywords: Deep Submicron, Free-Standing, Laser Ablation, Polyimide

References

[1] Kim H, Ku B C, Goh M, et al. Synthesis and characterization of phosphorus and sulfur containing aromatic polyimides for high refractive index [J]. Polymer, 2018, 136:143–148.

DOI: 10.1016/j.polymer.2017.12.052

[2] Yen H J, Wu J H, Huang Y , et al. Novel thermally stable and soluble triarylamine functionalized polyimides for gas separation [J]. Polymer Chemistry, 2014, 5(14):4219.

DOI: 10.1039/c4py00449c

[3] Salehian P, Chung T S. Thermally treated ammonia functionalized graphene oxide/polyimide membranes for pervaporation dehydration of isopropanol [J]. Journal of Membrane Science, 2017, 528:231-242.

DOI: 10.1016/j.memsci.2017.01.038

[4] Liu H, Wang, Naixin, Zhao, Cui, et al. Membrane materials in the pervaporation separation of aromatic/aliphatic hydrocarbon mixtures-A review [J]. Chinese Journal of Chemical Engineering, 2017, 26(1): S1004954117300460.

DOI: 10.1016/j.cjche.2017.03.006

[5] Siqing S, Wu H, Takahara A. Morphology of nanoimprinted polyimide films fabricated via a controlled thermal history [J]. Polymer Journal, 2012, 44(10):1036-1041.

DOI: 10.1038/pj.2012.53

[6] Stadermann M, Baxamusa S H, Floyd Iii W C, et al. Preparation of large ultrathin free-standing polymer films [J]. (2019).

[7] Romero F, Salinas-Castillo A, Rivadeneyra A, et al. In-Depth Study of Laser Diode Ablation of Kapton Polyimide for Flexible Conductive Substrates [J]. Nanomaterials, 2018, 8(7).

DOI: 10.3390/nano8070517

[8] He R , Ma H , Zheng J , et al. Periodic structure with a periodicity of 2–3.5?μm on crystalline TiO2 induced by unpolarized KrF excimer lasers [J]. Applied Physics A, 2016, 122(8):727.

DOI: 10.1007/s00339-016-0257-7

[9] Wang B, Wang X C, Zheng H Y , et al. Femtosecond laser-induced surface wettability modification of polystyrene surface [J]. Science China(Physics,Mechanics & Astronomy), 2016, 59(12):124211.

DOI: 10.1007/s11433-016-0307-1

[10] Hüpkes J, Owen J I, Pust S E, et al. Chemical Etching of Zinc Oxide for Thin-Film Silicon Solar Cells [J]. Chemphyschem. 2012:13, 66-73.

DOI: 10.1002/cphc.201100738

[11] Park J H, Pak H K, Cho C R. Deposition-Temperature Effects on AZO Thin Films Prepared by RF Magnetron Sputtering and Their Physical Properties [J]. Journal of the Korean Physical Society 2006，49:S584-S588.

[12] Kluth O, Schope G, Hupkes J, et al. Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behavior [J]. Thin Solid Films 2003; 442: 80-85.

DOI: 10.1016/s0040-6090(03)00949-0

[13] Rayerfrancis A, Bhargav P B, Ahmed N, et al. Sputtered AZO Thin Films for TCO and Back Reflector Applications in Improving the Efficiency of Thin Film a-Si:H Solar Cells [J]. Silicon, 2017, 9(1):31-38.

DOI: 10.1007/s12633-015-9350-3

[14] Kawakami H, Mikawa M, Nagaoka S. Gas transport properties in thermally cured aromatic polyimide membranes [J]. Journal of Membrane Science 1996; 118:223-230.

DOI: 10.1016/0376-7388(96)00115-9

[15] Brannon J H, Lankard J R, Baise A I, et al. Excimer laser etching of polyamide [J]. Journal of Applied Physics 1985; 58 (5): 2036-2043.

DOI: 10.1063/1.336012

[16] Romero F, Salinas-Castillo A, Rivadeneyra A, et al. In-Depth Study of Laser Diode Ablation of Kapton Polyimide for Flexible Conductive Substrates [J]. Nanomaterials, 2018, 8(7).

DOI: 10.3390/nano8070517

[17] Oliveira V, Vilar R. KrF pulsed laser ablation of polyimide [J]. Applied Physics A, 2008, 92(4):957-961.

DOI: 10.1007/s00339-008-4619-7

[18] Diaham S, Belijar G, Locatelli M L, et al. Thermal runaway in polyimide at high electric field probed by infrared thermography [J]. Applied Physics Letters, 2015, 106(12):88.

DOI: 10.1063/1.4916638