The Influence of Catalysts on the Gas Sensitivity of a Gas Sensor Based on SnO₂ Films + 1 % at. Si

Abstract:

The paper is devoted to the study of the influence of surface modification by catalysts on the gas sensitivity of a gas sensor. The sample for the study is a gas sensor crystal with dimensions of 1 × 1 mm², manufactured using microelectronic technology. Its design is represented by a film heater, two sensitive elements (SE) based on tin dioxide with the addition of 1 % at. Si (film thickness = 250 nm, the size of the SE area is 200 x 320 μm²) and contacts for the sensitive layer in the form of an interdigital platinum structure with a distance between contacts of 10 μm. It is established that doping increases the gas sensitivity and lowers the operating temperature.

• Periodical: Nano Hybrids and Composites (Volume 28)
• Pages: 161-169
• DOI: https://doi.org/10.4028/www.scientific.net/NHC.28.161
• Online since: February 2020
• Authors: Tatyana Aleksandrovna Perepechina*, Stanislav Ivanovich Rembeza, Tamara Vital'evna Svistova, Еkaterina Stanislavovna Rembeza, Vadim Aleksandrovich Buslov
• Keywords: Catalyst, Gas Sensitivity, Gas Sensor, Palladium, Silver, Surface Modification, Thin Films, Tin Dioxide

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