Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Jun Hyub Park; Chang Seung Lee; Yun Jae Kim

doi:10.4028/www.scientific.net/SSP.110.3

Paper Titles

Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch
p.3

Corrosion Fatigue Characteristics of Artificially Sensitized Austenitic STS304
p.9

A Study on the Evaluation of Pipe Fracture Characteristics
p.15

Excavation-Induced Buried Pipeline Failure – A Case Study
p.23

The Oxidation and High Temperature Fatigue of P23 Alloy
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Structural Stress Based Fatigue Life Evaluation for Heat Exchanger Motor Operated Valve
p.39

Detection and Evaluation of Localized Damage under Creep-Fatigue Loading at 1000°F Using Acoustic Emission Technique
p.45

Analysis of Three-Dimensional Cracks with Independent Crack Mesh
p.55

A Method of J Testing Based on Crack Opening Displacement for Circumferential Through-Wall Cracked Pipes under Combined Tension and Bending
p.63

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Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Abstract:

This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and –0.1514, respectively.