Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch

Abstract:

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This paper presents high cycle fatigue properties of a Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1μm and 480.0μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and –0.1514, respectively.

Info:

Periodical:

Solid State Phenomena (Volume 110)

Edited by:

Young-Jin Kim

Pages:

3-8

DOI:

10.4028/www.scientific.net/SSP.110.3

Citation:

J. H. Park et al., "Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for RF MEMS Switch ", Solid State Phenomena, Vol. 110, pp. 3-8, 2006

Online since:

March 2006

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Price:

$35.00

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