Analysis of a Microelectrostatic Motor

Abstract:

An electrostatic motor is a very complex dynamical system whose performance critically depends on the shape of the rotor and stator, number of poles, clearances between axis and rotor, friction, rotor vibrations, and levitation, etc. There are many possible micromotor constructions depending on the required accuracy, the speed of rotation and power of the motor. This work shows the technology required to build a micromotor using UV lithography. Studies of vibration characteristics using ANSYS and MATLAB modeling software and an experimental analysis to optimize the dynamical properties of the system and to improve its manufacturing process are also shown.

• Periodical: Solid State Phenomena (Volume 113)
• Pages: 185-189
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.113.185
• Online since: June 2006
• Authors: Vytautas Ostaševičius, Vytautas Bagdonas, Sigitas Tamulevičius, V. Grigaliūnas
• Keywords: ANSYS, Electroplating, Electrostatic, Lithography, Micro-Electromechanical System (MEMS), Micromotor, Vibration Analysis (VA), Vibration Mode

References

[1] R. Daukševičius, V. Ostaševičius, A. Bubulis and S. Tamulevičius: Theoretical and experimental modal analysis of cantilever microstructure of electrostatic MEMS Switch (Vibroengineering Proceedings of 5th International Conference, 14-15 October 2004, Kaunas, Lithuania, 2004).

[2] JPL NASA Publication 99-1: MEMS Reliability Assurance Guidelines for Space Applications (1999), p.135.

[3] V. Ostaševičius: Dynamics and Modelling of of Mechanical Constructions (1998), p.212 (in Lithuanian).

[4] R. Barauskas, V. Ostaševičius: Analysis and optimization of elastic vibro-impact systems (1999), p.6.