Paper Titles
A Methodology for Automatically Deriving Simple Electromechanical Equivalent Models from FEM-Models
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Technological Trends of Nanoelectromechanical Systems
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A Computer Control System for the Hydraulic Stand MZPK 100 for Biaxial Fatigue Testing
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Modeling of a Mechatronic System with the AC Induction Motor Supplied by the Frequency Converter
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Asymmetric PI Controller for Mechatronic Systems
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Microprocessor Control System of an Electric Arc Welding Unit
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Calculation of the Parameters of a Linear Electric Drive
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Technological Trends of Nanoelectromechanical Systems

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Abstract:

The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented.

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Periodical:

Solid State Phenomena (Volume 113)

Pages:

7-12

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.113.7

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Online since:

June 2006

Authors:

R. Navickas

Keywords:

Micro-Electromechanical System (MEMS), Nanoelectromechanical Systems (NEMS), Nanotechnology, Self-Formation Processes, Top-Down Method

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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