Technological Trends of Nanoelectromechanical Systems

Abstract:

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The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented.

Info:

Periodical:

Solid State Phenomena (Volume 113)

Edited by:

Nin Bizys, Andrejus Henrikas Marcinkevicius

Pages:

7-12

DOI:

10.4028/www.scientific.net/SSP.113.7

Citation:

R. Navickas "Technological Trends of Nanoelectromechanical Systems", Solid State Phenomena, Vol. 113, pp. 7-12, 2006

Online since:

June 2006

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$35.00

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