Technological Trends of Nanoelectromechanical Systems
The analysis of technological trends nanoelectromechanical systems and processes of self-formation micro- and nanostructures in manufacturing MEMS/NEMS have been made and the requirements have been formulated. The results of modeling geometry nanostructures and the implementation of self-formation processes for creating new technologies of manufacturing MEMS/NEMS have also been presented.
Nin Bizys, Andrejus Henrikas Marcinkevicius
R. Navickas "Technological Trends of Nanoelectromechanical Systems", Solid State Phenomena, Vol. 113, pp. 7-12, 2006