Comparative Evaluation of TiN/CrN, AlN/CrN, TiAlN/CrN Multilayer Films for the Use of Semi-Solid Processing of Cu Alloys

Abstract:

In order to investigate the effect of PVD coatings on the performance of proto-type high temperature mold and to identify the best candidate thin films for Cu semi-solid processing, TiAlN/CrN multilayer coatings with various superlattice periods was synthesized using a closed field unbalanced magnetron sputtering method with separate Cr and TiAl and characteristics of these films were compared with those from TiN/CrN and AlN/CrN films in terms of microstructure, nanoindentation hardness, and oxidation test at 900
in air. TiN/CrN film showed the best mechanical properties but their oxidation resistance, the most critical property for high temperature semi-solid processing was the poorest. Therefore TiAlN films with a superlattice period of 6.1nm which has intermediate plastic deformation resistance with the best oxidation resistance were considered to be the best candidate out of three different films studied in this work.

• Periodical: Solid State Phenomena (Volumes 116-117)
• Pages: 124-127
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.116-117.124
• Online since: October 2006
• Authors: Sang Yong Lee, Sang Yul Lee
• Keywords: AlN/CrN, Cu-Semi-Solid-Processing, PVD Coating, TiAlN/CrN Thin Film, TiN/CrN

References

[1] J.S. Yoon, H.S. Myung, J.G. Han and J. Musil: Surf. & Coat. Technol. Vol. 131 (2000), p.372.

[2] W.D. Munz: J. Vac. Sci. Tech. Vol. A4(6) (1986), p.2701.

[3] O. Knotek, W.D. Munz, and T. Leyndecker: J. Vac. Sci. Tech., Vol. A4(6) (1986), p.2695.

[4] S.Y. Lee. G.S. Kim, J.H. Hahn: Surf. Coat. Tech., Vol. 177-178 (2004), p.426.

[5] G.S. Kim, S.Y. Lee, J.H. Hahn, and S.Y. Lee: Surf. Coat. Tech., Vol. 171 (2003), p.91.

[6] X. Chu and S.A. Barnet: J. Appl. Phys., Vol. 77(1996), p.170.

[7] G.S. Kim: Ph.D. Thesis, Hankuk Aviation University (2006).

[8] C.W. Kim and K.H. Kim: Thin Solid Films, Vol. 307(1997), p.113.