Mechanical Properties and Cutting Performance of CHx-TiNbAlN Coatings

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Abstract:

CHx-TiNbAlN coatings were deposited on WC turning tools and silicon wafers using a radio frequency unbalanced magnetron sputtering system with acetylene fluxes in the range of 4 to 12 sccm. The hardness of the coatings decreased with an increasing acetylene flux. By contrast, the H/E ratio increased as the acetylene flux increased and reached a value of 0.097 for the CH12-TiNbAlN coating. The CH12-TiNbAlN coating was found to improve the wear resistance of the turning tool by around 15% compared to that of an uncoated tool.

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Solid State Phenomena (Volume 394)

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97-102

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June 2026

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© 2026 Trans Tech Publications Ltd. All Rights Reserved

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