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Online since: December 2012
Authors: Lin Sheng
The Simulation Application for the Structure Design of the Etcher Nozzle
Lin Sheng
China JiLiang University HangZhou, P.R.China
lins@cjlu.edu.cn
Keywords: Etcher; Nozzle; Structure; Simulation; Flow Field
Abstract.
This paper studied the etcher nozzle structure in detail by using the flow simulation technology to analyze how to get uniform follow field on the surface of the etching wafer, and then this paper determined the structure parameters of the etcher nozzle. 1.
This paper adopted the software CFD-ACE to study the etcher nozzle structure in detail so that to offer the theoretical basis to get the structure parameters of the etcher nozzle by using the simulation method. 2.
Navier-Stokes equation: Here, -----Density; ----- Velocity; u,v,w-----Velocity component; p-----Pressure; ----- Dynamic viscosity; (i=x,y,z)-----Source term for all directions. 2.2 The simulation process Ø Modeling(Solidworks) Ø Model meshing(ICEM) Ø Simulation computation(CFD-ACE) Ø After-treatment process simulation(CFD-VIEW) Ø Data analysis and treatment The detailed flow as follow: Start ICEM makes the meshing document Set parameters, ACE+ computation Divergence?
Treatment, analysis Over Y Y 3 Simulation result and analysis 3.1 Test condition Under no change of other terms, the flow field changing in the reaction chamber was studied for different nozzle structures, and the nozzle structure parameters were set finally.
This paper studied the etcher nozzle structure in detail by using the flow simulation technology to analyze how to get uniform follow field on the surface of the etching wafer, and then this paper determined the structure parameters of the etcher nozzle. 1.
This paper adopted the software CFD-ACE to study the etcher nozzle structure in detail so that to offer the theoretical basis to get the structure parameters of the etcher nozzle by using the simulation method. 2.
Navier-Stokes equation: Here, -----Density; ----- Velocity; u,v,w-----Velocity component; p-----Pressure; ----- Dynamic viscosity; (i=x,y,z)-----Source term for all directions. 2.2 The simulation process Ø Modeling(Solidworks) Ø Model meshing(ICEM) Ø Simulation computation(CFD-ACE) Ø After-treatment process simulation(CFD-VIEW) Ø Data analysis and treatment The detailed flow as follow: Start ICEM makes the meshing document Set parameters, ACE+ computation Divergence?
Treatment, analysis Over Y Y 3 Simulation result and analysis 3.1 Test condition Under no change of other terms, the flow field changing in the reaction chamber was studied for different nozzle structures, and the nozzle structure parameters were set finally.
Online since: January 2013
Authors: Ran Hui Liu
This paper mainly aims to get rotor aerodynamic performance curve and has studied the matching between the rotor and generator based on the numerical simulation method of the computational fluid dynamics, using the finite volume method to calculate the pneumatic performance of H-type wind power generator, so as to provide guidance for the power control of the small h-vertical axis wind turbine.
So far, there is not a set of system theory methods used to study H type vertical axis wind machine, thus the vertical axis wind machine in a long time gets no further development, CFD technology has brought good opportunities for the development of the small H type wind power generator.
It Aims to establishment of rotor flow field model for the small H type vertical axis wind machine by using CFD numerical simulation software Fluent to caculate torque of the flow in different wind speed of the rotor power so to output the wind down windmill speed and output torque, output power and the relationship between the curve and motor characteristic curve correspondence and to produce maximum powe wind power generator.
According to the law of technology, the X, Y, and Z three direction of the conservation of momentum equation can be described as : X: (2) Y: (3) Establish CFD model Rrotor model simplified Vertical axle rotor structure is indeed more complex, in CFD calculation it needs to simplify, the impact of connecting rod,the rotor shaft component on wheel the flow field is not big, in the CFD modeling can be neglected.
Computational fluid dynamic credit - CFD software principle and application [M].
So far, there is not a set of system theory methods used to study H type vertical axis wind machine, thus the vertical axis wind machine in a long time gets no further development, CFD technology has brought good opportunities for the development of the small H type wind power generator.
It Aims to establishment of rotor flow field model for the small H type vertical axis wind machine by using CFD numerical simulation software Fluent to caculate torque of the flow in different wind speed of the rotor power so to output the wind down windmill speed and output torque, output power and the relationship between the curve and motor characteristic curve correspondence and to produce maximum powe wind power generator.
According to the law of technology, the X, Y, and Z three direction of the conservation of momentum equation can be described as : X: (2) Y: (3) Establish CFD model Rrotor model simplified Vertical axle rotor structure is indeed more complex, in CFD calculation it needs to simplify, the impact of connecting rod,the rotor shaft component on wheel the flow field is not big, in the CFD modeling can be neglected.
Computational fluid dynamic credit - CFD software principle and application [M].
Online since: December 2011
Authors: Qun Zheng, Guo Qiang Yue, Shi Wei Dong, Jia Rui Li
The numerical simulations of the ORC turbine were carried out by using the CFD program.
As shown in the Table 3, the mass rate and total pressure ratio are very closely between design and numerical simulation results.
The simulation isentropic efficiency is higher than the design goal.
The main reason for this situation is neglected the tip clearance and numerical simulation also has somewhat effects.
Table 3 Overall performances of the turbine Mass flow[kg/s] Design 4.85 CFD simulation 4.91 Isentropic efficiency Design 86.63% CFD simulation 90.08% Power [kW] Design 308.15 CFD simulation 330.45 (a) (b) (a) (b) Fig.5 The distribution of static pressure on the stator (a)and rotor(b) blade surface at midspan Fig.6 The calculated limiting streamline patterns near the suction surface(a) and pressure surface(b) of the rotor Fig.5(a) shows the distributions of static pressure on the stator blade surface at 50% blade height.
As shown in the Table 3, the mass rate and total pressure ratio are very closely between design and numerical simulation results.
The simulation isentropic efficiency is higher than the design goal.
The main reason for this situation is neglected the tip clearance and numerical simulation also has somewhat effects.
Table 3 Overall performances of the turbine Mass flow[kg/s] Design 4.85 CFD simulation 4.91 Isentropic efficiency Design 86.63% CFD simulation 90.08% Power [kW] Design 308.15 CFD simulation 330.45 (a) (b) (a) (b) Fig.5 The distribution of static pressure on the stator (a)and rotor(b) blade surface at midspan Fig.6 The calculated limiting streamline patterns near the suction surface(a) and pressure surface(b) of the rotor Fig.5(a) shows the distributions of static pressure on the stator blade surface at 50% blade height.
Online since: February 2011
Authors: Wen Hua Jia, Chen Bo Yin, Guo Jin Jiang
CFD is used to examine the flow features of the throttle notches of valves.
A wide variety of notch types have appeared in hydraulic valves in industrial applications, of which four types as shown in Fig.2 are chosen for the simulation and analysis of features.
CFD Analysis and Results.
[4] Xia G H, Zhao Y, Yao J H (2009) Parallel unstructured multigrid simulation of 3D unsteady flows and fluid-structure interaction in mechanical heart valve using immersed membrane method.
[6] C Srikanth, C Bhasker (2009) Flow analysis in valve with moving grids through CFD techniques.
A wide variety of notch types have appeared in hydraulic valves in industrial applications, of which four types as shown in Fig.2 are chosen for the simulation and analysis of features.
CFD Analysis and Results.
[4] Xia G H, Zhao Y, Yao J H (2009) Parallel unstructured multigrid simulation of 3D unsteady flows and fluid-structure interaction in mechanical heart valve using immersed membrane method.
[6] C Srikanth, C Bhasker (2009) Flow analysis in valve with moving grids through CFD techniques.
Online since: October 2010
Authors: Claudio Roberto Duarte, Marcos A.S. Barrozo, D.A. Santos, I. Petri Junior
MIXTURE OF PARTICLES’ INFLUENCE IN COMPUTER SIMULATIONS OF A SPOUTED BED
D.
João Naves de Ávila, 2121, Bloco 1K, Campus Santa Mônica, Uberlândia - MG, CEP 38408-100 aclaudiofequfu@gmail.com Keywords: spouted bed, CFD, particle mixture Abstract.
Studies of numerical simulation techniques and computational fluid dynamics (CFD) have become popular in the field of gas-solid two-phase flow.
Table 1-Simulation conditions.
Rahimi: CFD Simulation of Gas-Solid Flow in a Spouted Bed with a Non-Porous Draft Tube, Chemical Engineering and Processing: Process Intensification, In Press, Available online 23 September 2009
João Naves de Ávila, 2121, Bloco 1K, Campus Santa Mônica, Uberlândia - MG, CEP 38408-100 aclaudiofequfu@gmail.com Keywords: spouted bed, CFD, particle mixture Abstract.
Studies of numerical simulation techniques and computational fluid dynamics (CFD) have become popular in the field of gas-solid two-phase flow.
Table 1-Simulation conditions.
Rahimi: CFD Simulation of Gas-Solid Flow in a Spouted Bed with a Non-Porous Draft Tube, Chemical Engineering and Processing: Process Intensification, In Press, Available online 23 September 2009
Online since: April 2013
Authors: Ahmad Jais Alimin, Shahrul Azmir Osman, V.S. Liong
The aim of the present investigation is to illustrate an innovative methodology based on numerical method to optimize combustion chamber geometry for retrofitting a dedicated mono-gas simulation engine using CFD package powered by Ansys workbench.
In the simulation, the working fluids are combination of air.
The TKE during suction stroke can be found out from the simulations to verify the generation of air-fuel structure inside the cylinder, as Fig 2.
The validation works through the experimental test will be carried out soon, as a proof that the performed CFD simulation has been correct and accurate.
[13] Varol, Y., et al., CFD modeling of heat transfer and fluid flow inside a pent-roof type combustion chamber using dynamic model.
In the simulation, the working fluids are combination of air.
The TKE during suction stroke can be found out from the simulations to verify the generation of air-fuel structure inside the cylinder, as Fig 2.
The validation works through the experimental test will be carried out soon, as a proof that the performed CFD simulation has been correct and accurate.
[13] Varol, Y., et al., CFD modeling of heat transfer and fluid flow inside a pent-roof type combustion chamber using dynamic model.
Online since: August 2013
Authors: Jing Bo Chen, Pan Pan Yang, Lin Hua Piao
Using ANSYS-FLOTRAN CFD software, the finite element simulation is conducted by a series of procedures, such as two-dimensional model building of fluidic gyroscope, meshing, loads applying and equation solving.
Fig. 3 Two-dimensional simplified models of sensitive cavity Solve with Finite Element Method The FLOTRAN CFD analysis of ANSYS software is an advanced tools used to study two dimensional and three dimensional flow fields, the simulation typically comprises modeling, loading and solving [3-4].
Select FLOTRAN CFD analysis of ANSYS software.
Conclusions ANSYS-FLOTRAN CFD software is used to calculate two-dimensional flow field distribution of different thermal wires spacing in fluidic gyroscope sensitive element.
Wang: Numerical simulation of practical engineering in ANSYS (Northwestern Polytechnical University Press, China 1999)
Fig. 3 Two-dimensional simplified models of sensitive cavity Solve with Finite Element Method The FLOTRAN CFD analysis of ANSYS software is an advanced tools used to study two dimensional and three dimensional flow fields, the simulation typically comprises modeling, loading and solving [3-4].
Select FLOTRAN CFD analysis of ANSYS software.
Conclusions ANSYS-FLOTRAN CFD software is used to calculate two-dimensional flow field distribution of different thermal wires spacing in fluidic gyroscope sensitive element.
Wang: Numerical simulation of practical engineering in ANSYS (Northwestern Polytechnical University Press, China 1999)
Online since: August 2012
Authors: Song Lin Xu, Ai Shuang Xiang, Xiao Ming Wang
Abstract.Effect of feed flow rate on velocity field of evaporating liquid film in a wiped film molecular distillatory was studied with a computational fluid dynamics (CFD) method.
Simulations were carried out in rotating coordinate system.
In our previous study[1], the RNG and Realizable k-εturbulent models treating near-wall turbulent flow were compared by means of CFD simulation.
It will be a new method to study flow of evaporating liquid film in WFMD by means of CFD simulation.
Wang, CFD simulation of short-path distillation and its application to purification of natural products, M S.
Simulations were carried out in rotating coordinate system.
In our previous study[1], the RNG and Realizable k-εturbulent models treating near-wall turbulent flow were compared by means of CFD simulation.
It will be a new method to study flow of evaporating liquid film in WFMD by means of CFD simulation.
Wang, CFD simulation of short-path distillation and its application to purification of natural products, M S.
Online since: January 2012
Authors: Yan Chen, Lin Cheng, Chun Sheng Guo, Wen Jing Du
The present study aims to analyze a new type PHE—double chevron-type PHE with 3D CFD mode from their heat transfer characteristics and resistance characteristics, as well as their internal flow field and temperature field.
2 Simulation
Preprocessing, the primary step of the CFD simulation was done by ICEM CFD13.0.
The final step in CFD, the post-processing was carried out to refine the simulation data for visualizing the vector plots, contour plots and particle tracking.
The simulation was solved using RNG k–e turbulence model.
The simulations were carried in a Pentium 8 work station with 12 GB RAM.
Each simulation took approximately 37 h to converge with a criterion of 1×10-5.
The final step in CFD, the post-processing was carried out to refine the simulation data for visualizing the vector plots, contour plots and particle tracking.
The simulation was solved using RNG k–e turbulence model.
The simulations were carried in a Pentium 8 work station with 12 GB RAM.
Each simulation took approximately 37 h to converge with a criterion of 1×10-5.
Online since: October 2011
Authors: Cong Shen, Jian Xiang Guo, Lin Li, Jin Fei Sun
With the rapid development of computer technology, computational heat transfer and computational fluid dynamics (CFD) have improved steadily.
In order to facilitate the simulation, a cuboid is taken as the research space.
Initial conditions and simulation parameters are shown in Table 1.
By simulation, the relationship between velocity and outlet temperature of smoke and water is shown in Fig. 4 and Fig. 5 respectively.
With the simulation results, experiment can be taken to delve into the characters of fluidized-bed heat exchanger.
In order to facilitate the simulation, a cuboid is taken as the research space.
Initial conditions and simulation parameters are shown in Table 1.
By simulation, the relationship between velocity and outlet temperature of smoke and water is shown in Fig. 4 and Fig. 5 respectively.
With the simulation results, experiment can be taken to delve into the characters of fluidized-bed heat exchanger.