The Refined Equations of Special Orthotropic Piezoelectric Plate-II: Symmetrical Transverse Surface Loadings
p.352
p.352
Analysis of Contacting Mechanical Characters Based on Cyclical Symmetrical Theory
p.356
p.356
A Coupled Fluid-Structure Simulation for Variable Displacement Pump Used in Vehicle
p.361
p.361
Characteristics of Self-Synchronization of Dual-Rotors System
p.366
p.366
The Simulation Application for the Structure Design of the Etcher Nozzle
p.372
p.372
Design Method of the Advanced Actuator
p.378
p.378
Innovation of the Advanced Actuator
p.382
p.382
Study on Inversions of the Offset Planetary Train with Bevel Gears
p.386
p.386
Steady-State Load Analysis of a Caterpillar Chassis by Finite Element Method
p.389
p.389
The Simulation Application for the Structure Design of the Etcher Nozzle
Abstract:
With the higher and higher etching rate, the flow field situation of the plasma etching chamber became an important factor to design the etcher chamber structure. This paper studied the etcher nozzle structure in detail by using the flow simulation technology to analyze how to get uniform follow field on the surface of the etching wafer, and then this paper determined the structure parameters of the etcher nozzle.
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Periodical:
Applied Mechanics and Materials (Volumes 249-250)
Pages:
372-377
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Online since:
December 2012
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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