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Synthesis of Crystallized TiNi Films by Ion Irradiation Noriaki Ikenaga1,a, Yoichi Kishi2,b, Zenjiro Yajima2,c and Noriyuki Sakudo2,d 1Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan 2Advanced Materials Science R and D Center, Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan an-ikenaga@neptune.kanazawa-it.ac.jp, bkishi@neptune.kanazawa-it.ac.jp, cyajimaz@neptune.kanazawa-it.ac.jp, dsakudo@neptune.kanazawa-it.ac.jp Keywords: shape memory alloy, multi-sputtering, low temperature crystallization, ion irradiation, ion energy, plasma potential Abstract.
TiNi is well known as a typical shape-memory alloy, and is expected to be a promising material for micro actuators.
In order to realize micro electro mechanical systems (MEMS) with this material, we have to get thin crystal film of the material, since the shape-memory property appears only when the structure is crystalline.
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Gisser, J.D.Busch, A.D.Johnson, A.B.Ellis, Oriented nickel-titanium shape memory alloy films prepared by annealing during deposition, Applied Physics Letters, 61(14) (1992), pp. 1632-1634 [6] CIMTEC2008 ike, Influence of substrate temperature on texture for deposited TiNi films, Proceedings of the 3rd International Conference on Smart Materials, Structures and Systems (CIMTEC 2008), State-of-the-art Research and Application of SMAs Technologies, 59 (2008), pp. 30-34 [7] N.Ikenaga, Y.Kishi, Z.Yajima and N.Sakudo, Low Temperature Crystallization of TiNi Films by Ion Irradiation, The 8th European Symposium on Martensitic Transformations (ESOMAT 2009), 05010 (2009), published by EDP Sciences (www.esomat.org), DOI:10.1051/esomat/200905010, 2009 [8] Y.Kishi, N.Ikenaga, N.Sakudo and Z.Yajima, Transforamation Behavior of Low Temperature Crystallized TiNi Shape Memory Alloy Films, The 8th European Symposium on Martensitic Transformations (ESOMAT 2009), 02012 (2009), published by EDP Sciences

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Introduction In the semiconductor industry, many types of materials, such as silicon, gallium arsenic, titanium dioxide and zinc oxide (ZnO), are used as base materials.
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Abdullah1, Kamarudin Hussin1 1Nihon Superior Electronic Materials Research Lab, Centre of Excellence Geopolymer & Green Technology, School of Materials Engineering, Universiti Malaysia Perlis (UniMAP), Perlis, Malaysia. 2School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia (USM), Penang, Malaysia ahafizhazizi@unimap.edu.my, barifanuar@unimap.edu.my Keywords: Powder Metallurgy, Lead-free Solder, Sn-0.7Cu, Silicon Nitride, Composite.
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The most common drying method employed for food materials to date was hot air drying.
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Therefore laser shock processing can not only improve the surface hardness of materials but also increase the fatigue life of materials.
The fatigue life of metallic materials will be improved vastly due to the role of these factors.
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