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These experiment data are very expensive no matter from the prototype experiment or computer simulation, so finding out the global model of the existing CCP etcher with less trials is necessary.
Typical etch fabrication process modeling and optimizing Xu and etc. have studied on a dual-frequency CCP etch chamber process, a 2D axisymmetric model of 300mm etcher is built in CFD-GEOM/CFD-ACE+, a popular multi-physics simulation software in semiconductor industry.
By orthogonal design, a group of plasma simulation experiments are carried out.
OPTIMUS software were adopted for the process modeling and later on RBF, Kringing and least-squares models are compared based on the simulation experiments data.
And it has been shown that error of the optimization and simulation result is less than 4%, it can give engineers good advice to modify etch input parameters.

Gao[3] performed a CFD simulation and experimental research on the temperature distribution of a condenser emerged HPWH tank.
Simulation of the Heat Pump System.
Simulation results of tank wall material selection.
Simulation results of leaking water.
Chen F.in: CFD Solution and Experimental Testing of Buoyancy-driven Convection Caused by Condensers Immersed in a Water Tank of HPWH.

Numerical simulations have been conducted by using the FIRE v2008 code.
(1) cylinder set (2) piston (3) cylinder cover (4) main combustion chamber (5) conical-spray nozzle (6) oriented surface (7) passage (8) central pedestal (9) swirl chamber Fig. 1 The diagram of combustion chamber Numerical Simulation The simulation of processes of spray and combustion is based on a single cylinder diesel engine, the combustion system is axial symmetry.
Pariotis, Investigation of piston bowl geometry and speed effects in a motored HSDI diesel engine using a CFD against a quasi-dimensional model, J.
Mattarelli, CFD parametric analysis of the combustion chamber shape in a small HSDI diesel engine, SAE paper 32 (2005) 1-13
Xin, Numerical simulation on effects of spray angle in a swirl chamber combustion system of DI diesel engines, J.

Analysis of Voltage Losses in High Temperature Proton Exchange Membrane Fuel Cells with Properties of Membrane Materials and Fluent Software XiaoLe Yang1,a, Yan Yin1,b*, Bin Jia1,2,c* and Qing Du1,d 1State Key Laboratory of Engines, School of Mechanical Engineering, Tianjin University, Tianjin, China 2Tianjin Internal Combustion Engine Research Institute, Tianjin, China aleleleyang@126.com, b*yanyin@tju.edu.cn, c*jiabin@cleanengines.com, dduqing@tju.edu.cn Keywords: voltage loss; high temperature proton exchange membrane; fuel cells; phosphoric acid doping; CFD Abstract.
Parameter Value Unit Channel length; width; depth 100; 1.0; 1.0 [mm] Rib width 0.5 [mm] Thicknesses of PEM; CL; GDL 0.05; 0.01; 0.2 [mm] Volume fraction of electrolyte in CL 0.4 [-] Porosities of CL; GDL 0.3; 0.4 [-] Permeabilities of CL; GDL 6.2´10-13; 6.2´10-12 [m2] Densities of PEM; CL; GDL; BP 1980; 1000; 1000; 1000 [kg m-3] Specific heat capacities of PEM; CL; GDL; BP 1650; 3300; 568; 1580 [J kg-1 K-1] Thermal conductivities of PEM; CL; GDL; BP 0.95; 1.0; 1.0; 20 [Wm-1K-1] Electrical conductivities of CL; GDL; BP 300; 300; 20000 [S m-1] FLUENT and user defined functions in the CFD code are used to solve this model.
Fig. 2 Polarization curves of simulations Fig. 3 Voltage losses at different DLs.

The simulation results indicate that the tangential velocity in exhaust pipe outward the radial direction increases gradually, and presents the vortex structure.
Pourquiéb et al: Prediction of strongly swirling flow within an axial hydrocyclone using two commercial CFD codes.
Zheng: Evaluations and modifications on Reynolds stress model in cyclone simulations.
Raju et al: CFD simulation and experimental validation studies on hydrocyclone.
Holtham: Large eddy simulation of hydrocyclone¾prediction of air-core diameter and shape.

Analysis Two-dimensional computational fluid dynamics (CFD) analysis [6] showed that no SiC grows at Ts ≥ 1863 K and that C-to-Si ratio is larger than unity at growth position when Ts was 1813−1853 K (Fig. 2).
To make a comparison with the reported observation under P of 18 kPa [5], additional CFD analysis was carried out at Ts of 1843 K (i.e., Tpyrometer = 1923 K [5]).
Topography simulation [7] was carried out, in a manner similar to the way in the previous section, using CSiH2e(∞) and CSiH20 (in the absence of HCl) or CSiCle(∞) and CSiCl0 (in the presence of HCl).
Symbols: experiments; lines: simulation using γ of (a) 0.04, (b) 0.05, and (c) 0.06 J/m2.

As the fast development of computer technologies and continuous progress of CFD technologies, it’s not difficult to solve the complex equations anymore.
CFD software is used to simulate the 3D flow field of the screen cavity by the principles of computation fluid dynamics in this paper.
Fig.2 Meshing model of flow field Mechanical Model of CFD Analysis.
Fig.11 The curve of total torque and impeller rotating angle Conclusion Fluid flow field model is established based on the structure parameters and the grid is meshed. 3D simulation model of roller-type oil screen is set up by N-S equations.

Fig. 1 Schematic illustration of a computational domain for PEMFC simulation.
Numerical model In this study, CFD programs based on STAR-CD version 4.12, a commercial finite volume technique solver, and ES-PEMFC version 2.40, were used to solve the fully coupled governing equations.
Fig.1 illustrates the computational domain for CFD-based PEMFC simulation which consists of two bipolar plates, the anode and the cathode gas channels, the anode and the cathode gas diffusion layers (GDLs), and MEA on active area of 25 cm2.
Numerical simulations were performed to compare the performance-related parameters of PEMFC for the SFFSB with those for the CASFF, focusing on pressure drop, discharge of condensed water, uniformity of current density over the entire surface area, and maximization of power density.

Anlin Wang et al[4] proposed Multidisciplinary Optimization of a hydraulic slide valve and the response surface function of transient hydrodynamic force acquired, but they use the method based on CFD analysis.
Simulation Model and Boundary Conditions According to the parameters of high-flow control valve, the nominal diameter, total length and stroke are 7.874in, 27.5591in and 3.1496in respectively.
References [1] FENG Weimin, HAN Ning, “Numerical simulation of optimum design of large diameter cyclic type regulating valve,” Engineering Journal of Wuhan University,Vol 39(1).p.76-79,(2006).
(In Chinese) [2] Han Xu, Zheng Ming Guang, “Hydrodynamic characterization and optimization of Contra-push check valve by numerical simulation,” Annals of Nuclear Energy, Vol 38, Issue 6, p. 1427-1437,(2011).
[4] WANG An-lin, WU Xiao-feng, ZHOUCheng-lin, “Multidisciplinary Optimization of a Hydraulic Slide Valve Based on CFD,”JOURNAL OF SHANGHAI JIAOTONG UNIVERSITY, Vol44(12), p.1767-1772, (2010).

However, they are accompanied by characteristic advantages and disadvantages, which limit their possibilities of application. 3D Computational Fluid Dynamics (CFD.
Within CFD, geometrical and physical conditions are modeled as realistic as possible and boundary conditionas are defined.
Beneficial of the CFD approach is its high accuracy and the ability to realistically model the systems.
Herrán-González et al., Modeling and simulation of a gas distribution pipeline network, in: Applied Mathematical Modelling, volume 33, no. 3, (2009), pp. 1584 -1600
Bermúdez et al., Simulation and Optimization Models of Steady-state Gas Transmission Networks, in: Energy Procedia, volume 64, (2015), pp. 130 -139