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The challenge this poses is further exacerbated by the introduction of new materials.
The largest single influx of new materials has come over the last decade with the introduction of high-k/metal gate (HK/MG) materials.
This paper focuses on the front-end-of-line (FEOL), summarizing key materials loss issues by process loop.
Between gate definition and silicide, material loss alters the effective channel length (Si loss), modifies the implant dose and profile (Si loss), modifies the depth of the implants (screen oxide instability), modifies implant spacing (sidewall consumption), and modifies strain engineering (distance between gate edge and SiGe).
This difference in materials results in plasma etch CD bias, poor incoming sidewall profiles, and a host of new defects.

Tian1 1School of Machinery Engineering, Shandong University of Technology, Zibo, Shandong 255049, China 2School of Mechatronics Engineering and Automation, Shanghai University, Shanghai 200072, China ahappychengx@yahoo.com.cn, bxizhang@shu.edu.cn Keywords: Micro/nano machining, custom micro tooling, ductile-mode machining Abstract.
The mask based technology has the limitations of fabricating 3D structures [1] and mechanical micro engineering is an easy and cheap way to fabricate microstructures [2].
Such materials usually use electrically conductive materials as bonding materials.
Schubert:Precision Engineering, Vol. 23 (1999), p. 229 [3] P.N.
:Engineering Manufacture, Vol. 223 (2009), p.121 [9] X.

Study on Green Building Materials Development in Hunan Baozhu Sheng 1, a 1 Anhui University of Architecture, Hefei, P.R.China, 230601 a shengbaozhu@sina.com Keywords: Green building.Green building materials.Hunan Abstract.As the foundation and important part of green building development, green building materials’ application and development directly determine the success of green building development, and also have a significant influence to complete the target of energy saving and emission reduction and comprehensive utilization in the building materials industry in Hunan.Through the survey of Hunan Province building materials industry present situation and resources, combined with the national development policies,this article is put forward the measure to accelerate the Hunan province green building materials development, make clear the basis idea, development target and key on our province green building materials development,develop the grow planning of green building materials
Introduction Green building materials are also called ecological building materials, construction materials and environmental health building materials.
The key problems of building materials in Hunan First,there is the concept of development issues.At present, the market of green building materials often refers to the green building materials products, which is aimed at has produced products, and for the production of the sources of raw materials, production process energy consumption, the production process waste emissions and waste product disposal are lack of attention to the corresponding.
These solid wastes directly or after appropriate treatment, can be used in the production of a variety of materials, such as fly ash, slag and other industrial waste can be used as cement and concrete admixtures used in hydraulic engineering, road engineering, construction waste, fly ash, coal gangue can be used in the production of aerated block, lightweight aggregate of new wall materials porous brick.
How to choose green building materials.Shanghai Building Materials, Vol.1(2012), p.34-36

Civil engineering uses steel as one of the basic structural materials.
Introduction Civil engineering uses steel as one of the basic structural materials.
Steel sheets in civil engineering Sheets are the basic steel products.
Hot-dip galvanised sheets [4] and organic-coated steel sheets [5] are mainly used in the civil engineering.
Gierzyńska-Dolna., Gorecki W., Corrosion Resistance of Galvanised Sheets Used in the Civil Engineering.

Engineering Three-Dimensional Digital Modeling Technology Based on the OGRE Graphics Engine Lushuang WEI1,2,a Ying Wang 1,b 1.
Conclusion This paper thoroughly and systematically studied the engineering three-dimensional data modeling and OGRE implementation, and proposed an engineering three-dimensional data field modeling technology based on the OGRE graphics engine - skeleton grid modeling technology.
Project supported by Key Issues of Ministry of Water Resources of China (948 project Grant NO. 201005), Project supported by henan Steel Structure Engineering Research Center of Visual Simulation, Project supported by Zhengzhou Steel Structure and Engineering Research Center (Grant NO. 20090408), Project supported by Zhengzhou city science and technology innovation team (Grant NO. 096SYJH21081), Project supported by Zhengzhou city science and technology research (Grant NO. 112PPTGY223).
References [1] Yi Zhang, Virtual reality technology in civil engineering[J], Engineering and Technology, 2003, 3(2): 44-49
[4] Lushuang Wei, Kai Sun, and JunhongZhang, The Application of Structural Engineering with 3DS MaxScript, Architecture and Building Materials, 2011,99-100(1):1175-1181

Experiment Materials.
[2] M.Otsu, Y.Katayama, T.Muranaka, Effect of Difference of Tool Rotation Direction on Forming Limit in Friction Stir Incremental Forming, Key Engineering Materials, 622/623-1 (2014) 390-397
[7] T.Ohashi, J.Chen, T.Nishihara, H.Mofidi Tabatabaei, Friction Stir Forming of Aluminum Alloy Gear-Racks, Key Engineering Materials, 725 (2016) 665-670
[8] T.Ohashi, H.Mofidi Tabatabaei, T.Ikeya, T.Nishihara, Friction Stir Forming of A5083 Aluminum Alloy Gear-Racks with WC Particles Embedded in Tooth Surface, Key Engineering Materials, 723 (2016) 148-153
[9] T.Ohashi, H.Mofidi Tabatabaei, T.Nishihara, Cylindrical Pin Embossment on A5083 Aluminum Alloy Substrate Fabricated by Friction Stir Forming, Key Engineering Materials, 730 (2017) 253-258

Experimental methods Materials.
Porous scaffold design for tissue engineering.
Journal of materials science-Materials in medicine. 2010;21:183-188
Medical engineering & physics. 2010;32:391-397
Synthetic polymer scaffolds for tissue engineering.

Mechanics applied to engineering.
Mechanical behavior of materials: engineering methods for deformation fracture and fatigue. 2nd ed.
ASME Journal of Basic Engineering 85, 528-534
Fatigue and Fracture of Engineering Materials and Structures 28, 971-981
Fatigue and Fracture of Engineering Materials and Structures 21(11), 1289-1306

Key Engineering Materials Vol. 10

Synthesis of the Layered-Spinel Intergrowth Structure Cathode Materials by Co-Precipitation Method Yuchuan Feng1, a, Shixi Zhao 2, b, Cewen Nan1 and Yuanhua Lin1 1 Department of Materials Science and Engineering, State Key Lab of New Ceramics and Fine Processing, Tsinghua University, Beijing 100084, China 2 Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055,China a fyc03@mails.tsinghua.edu.cn, bzhaosx@sz.tsinghua.edu.cn Keywords: Intergrowth structure; Co-precipitation method; Cathode materials Abstract.
Meanwhile the rate Li/M is also a key factor for synthesis of layered-spinel intergrowth structure cathode materials without other impurities.
Recently attempts have been made to exploit the advantages of both materials by blending both layered and spinel oxide materials [13, 14].
But these composites cathode materials were obtained by simple mix.
Meanwhile the rate Li/M is also a key factor for synthesis of layered-spinel intergrowth structure cathode materials without other impurities.