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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393CVD SiC Powder for High-Purity SiC Source Material

CVD SiC Powder for High-Purity SiC Source Material

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

155-158

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.155

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Online since:

April 2002

Authors:

Sashiro Ezaki, M. Saito, K. Ishino

Keywords:

Acheson, Chemical Vapor Deposition (CVD), High Purity, Powder, Sublimation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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