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Electrical Performances of Low Temperature Annealed Hafnium Oxide Deposited at Room Temperature

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Abstract:

In this work, HfO2 was deposited by r.f. sputtering at room temperature and then annealed for different times at 200°C in a forming gas atmosphere. After annealing for 2 hours the HfO2 layers present a reduction on the flat band voltage of about 1 V, relatively to the as deposited film, decreasing from -2.23V down to -1.28 V. This means an improvement of the interface properties and a reduction on the oxide charge density from 1.33×1012 cm-2 to 7.62×1011 cm-2. The dielectric constant reaches a maximum of 18.3 after 5h annealing due to film’s densification. When annealing for longer times such as 10h a small degradation of the electrical properties is observed. After 10h annealing the dielectric constant, flat band voltage and fixed charge density are respectively, 14.9, -2.96 V and 1.64 ×1012 cm-2 and the leakage current also increases due to film’s crystallization.

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Advanced Materials Forum III View Preview

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Periodical:

Materials Science Forum (Volumes 514-516)

Pages:

58-62

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.514-516.58

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Online since:

May 2006

Authors:

Luís Pereira, Pedro Barquinha, Elvira Fortunato, Rodrigo Martins

Keywords:

Annealing, Hafnium Oxide, Sputtering

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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