Paper Titles
Growth and Surface Morphologies of 6H SiC Bulk and Epitaxial Crystals
p.67
Processing of Poly-SiC Substrates with Large Grains for Wafer-Bonding
p.71
Modeling and Experimental Verification of SiC M-PVT Bulk Crystal Growth
p.75
Basal Plane Dislocation Dynamics in Highly p-Type Doped versus Highly n-Type Doped SiC
p.79
High Quality SiC Crystals Grown by the Physical Vapor Transport Method with a New Crucible Design
p.83
Active Thermal Interaction of Source and Crystal Surfaces in PVT SiC Crystal Growth
p.87
The Influence of SiC Powder Source on 6H-SiC Single Crystals Grown by the Sublimation Method
p.91
Polytype Control in 6H-SiC Grown via Sublimation Method
p.95
Characterization of Bulk <111> 3C-SiC Single Crystals Grown on 4H-SiC by the CF-PVT Method
p.99

High Quality SiC Crystals Grown by the Physical Vapor Transport Method with a New Crucible Design

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Abstract:

SiC single crystal ingots grown by sublimation physical vapor transport (PVT) technique were prepared and then the SiC crystal quality with varying crucible design employing a guide tube and tantalum foil was systematically investigated. The growth rate of 2-inch SiC crystal grown by these crucible designs was about 0.3 mm/hr. The n-type and p-type 2”-SiC single crystals exhibiting the polytype of 6H-SiC were successfully fabricated. The doping concentration level of below ~1017/cm3 was extracted from the absorption spectrum and Hall measurement. The densities of micropipes and inclusions in SiC crystal boules grown using the graphite/Ta foil double layer guide tube were significantly decreased. Finally we improved crystal quality through the introduction of new crucible design.

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Silicon Carbide and Related Materials 2005 View Preview

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Periodical:

Materials Science Forum (Volumes 527-529)

Pages:

83-86

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.527-529.83

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Online since:

October 2006

Authors:

Kap Ryeol Ku, Jung Kyu Kim, Jung Doo Seo, Ju Young Lee, Myung Ok Kyun, Won Jae Lee, Geun Hyoung Lee, Il Soo Kim, Byoung Chul Shin

Keywords:

Crucible, Crystal Boules, Guide Tube, PVT, Sublimation, Tantalum Foil

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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