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Diamond Tip Cantilever for Micro/Nano Machining Based on AFM

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Abstract:

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip allows the formation of damaged layer on silicon substrate by a simple scratching process. A thin damaged layer forms in the substrate along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the fabrication processes of the micro cantilever and diamond tip as a tool for TNL. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

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Periodical:

Materials Science Forum (Volumes 505-507)

Pages:

79-84

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.505-507.79

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Online since:

January 2006

Authors:

Jeong Woo Park, Deug Woo Lee, Noboru Takano, Noboru Morita

Keywords:

Atomic Force Microscope (AFM), Cantilever, Diamond Tip, Nano-Scale Fabrication, Tribo-Nanolithography TNL

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© 2006 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] K. Ashida, N. Morita, and Y. Yoshida, JSME Int. J. Ser. C, 44(1), 244 (2001).

Google Scholar

[2] R. D. Piner, J. Zhu, F. Xu, S. Hong, and C. A. Mirkin, Science, 283, 661 (1999).

Google Scholar

[3] D. M. Kolb, R. Ullmann, and T. Will, Science, 275, 1097 (1997).

Google Scholar

[4] J. A. Dagata, Science, 270, 1625 (1995).

Google Scholar

[5] K. Wilder, and C. F. Quate, Appl. Phys. Lett., 73(17), 2527 (1998).

Google Scholar

[6] H. Dai, J. H. Hafner, A. G. Rinzler, D. T. Colbert, and R. E. Smalley, Nature, 384, 147 (1996).

Google Scholar

[7] J. Steckl, H. C. Mogul, and S. Morgen, Appl. Phys. Lett., 60(15), 1833 (1992).

Google Scholar

[8] Yavas, C. Ochiai, M. Takai, A. Hosono, and S. Okuda, Appl. Phys. Lett., 76(22), 3319 (2000).

DOI: 10.1063/1.126638

Google Scholar

[9] J. A. Kan, A. A. Bettiol, and F. Watt, Appl. Phys. Lett., 83(8), 1629 (2003).

Google Scholar

[10] M. D. Austin, and S. Y. Chou, Appl. Phys. Lett., 84(26), 5299 (2003).

Google Scholar

[11] J. W. Park, N. Kawasegi, N. Morita, and D. W. Lee, Appl. Phys. Lett., 85(10), 1766 (2004).

Google Scholar

[12] J. W. Park, D. W. Lee, N. Kawasegi, and N. Morita, KSPE fall conf., 1315, (2004).

Google Scholar

[13] J. W. Park, et al, J. Manuf. Sci. Eng. -Trans. ASME, 124(4), 801 (2004).

Google Scholar

[14] N. Takano, et al., J. of JSAT, 48(9), 510 (2004).

Google Scholar

[15] N. H. Kim, D. W. Lee, and C. W. Kim, 4 th IWMF, China, 765 (2004). Fig. 12 AFM topography images of microstructures prepared by TNL with different cutting edge directions of diamond tip after etching in 20 wt% KOH for 5 min.

Google Scholar